Reduction of Acoustic Waves Induced by Discharge in High Repetition Rate ArF Excimer Laser Cavity to Obtain Narrow-Bandwidth Laser Light

The suppression of acoustic waves caused by discharge in a laser chamber, which is a technical challenge we face in the development of next-generation 6 kHz ArF lasers for lithography, is studied. In this paper, we describe, firstly, that the acoustic waves produced in an ArF laser medium were obser...

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Veröffentlicht in:	Japanese Journal of Applied Physics 2006-10, Vol.45 (10R), p.7719
Hauptverfasser:	Kakizaki, Koji, Yabu, Takayuki, Hori, Tsukasa, Mizoguchi, Hakaru, Sakai, Yosuke
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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