A Theoretical Analysis of Electromigration Failure in Aluminum Interconnections

Electromigration was analyzed mathematically by solving Huntington's equation. A general solution assuming steady-state conditions was derived by Fourier transformation and complex integration. The analysis revealed that a significant accumulation of atoms at the anode induced hillock formation...

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Veröffentlicht in:	Japanese Journal of Applied Physics 2006-07, Vol.45 (7R), p.5716, Article 5716
Hauptverfasser:	Nemoto, Takenao, Jr, A. Toshimitsu Yokobori, Murakawa, Tsutomu
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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