Formation of Nanoscale Diamond Particles without Substrate Heating by Cathodic Arc Deposition

A carbon film grown at room temperature using a cathodic arc process in ambient gases such as N 2 and He was investigated by Raman spectroscopy and scanning electron microscopy (SEM). Diamond particles were found to be formed at a constant total pressure of 10 -2 Pa, while graphite-like carbon was g...

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Veröffentlicht in:	Japanese Journal of Applied Physics 2005-01, Vol.44 (5L), p.L746
Hauptverfasser:	Aoki, Katsunori, Suzuki, Keisuke, Ishii, Kazuhisa, Takanashi, Kumiko, Komukai, Takuji, Oura, Kenjiro, Hirao, Takashi
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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