Growth Temperature Dependence of SrTiO 3 Thin Films by Molecular Beam Epitaxy

The effect of Sr deposition on the chemically formed SiO 2 layer of Si(001) substrates and consequently the growth of SrTiO 3 thin films on the Si(001)-Sr(2×1) surface have been studied using reflection high-energy electron diffraction (RHEED), X-ray diffraction and atomic force microscopy. After Sr...

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Veröffentlicht in:	Japanese Journal of Applied Physics 2005-01, Vol.44 (1S), p.677
Hauptverfasser:	Bhuiyan, Md. Nurul Kabir, Kimura, Hiroaki, Tambo, Toyokazu, Tatsuyama, Chiei
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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