A Low-Profile Design for the Noncontact Ultrasonically Levitated Stage

In this paper, we propose a new low-profile design for a linear bearing based on Near-Field Acoustic Levitation (NFAL). Two flat beams at a 45° angle are used as a guide rail, and a slider is levitated by ultrasonic bending vibrations excited along the beams. The beams are excited by a pair of Lange...

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Veröffentlicht in:	Japanese Journal of Applied Physics 2005-06, Vol.44 (6S), p.4662
Hauptverfasser:	Ide, Takeshi, Friend, James Robert, Nakamura, Kentaro, Ueha, Sadayuki
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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