A Low-Profile Design for the Noncontact Ultrasonically Levitated Stage

A Low-Profile Design for the Noncontact Ultrasonically Levitated Stage

In this paper, we propose a new low-profile design for a linear bearing based on Near-Field Acoustic Levitation (NFAL). Two flat beams at a 45° angle are used as a guide rail, and a slider is levitated by ultrasonic bending vibrations excited along the beams. The beams are excited by a pair of Lange...

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Veröffentlicht in:Japanese Journal of Applied Physics 2005-06, Vol.44 (6S), p.4662
Hauptverfasser: Ide, Takeshi, Friend, James Robert, Nakamura, Kentaro, Ueha, Sadayuki
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container_title Japanese Journal of Applied Physics
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creator Ide, Takeshi
Friend, James Robert
Nakamura, Kentaro
Ueha, Sadayuki
description In this paper, we propose a new low-profile design for a linear bearing based on Near-Field Acoustic Levitation (NFAL). Two flat beams at a 45° angle are used as a guide rail, and a slider is levitated by ultrasonic bending vibrations excited along the beams. The beams are excited by a pair of Langevin transducers with “+”-shaped vibration direction converters (L-L converters) to install the transducers in the same plane of the beam and to lower the total height of the setup. First, the design of the vibration converter is described. Then, a two-phase driving system to excite a traveling wave is investigated theoretically and experimentally. The levitation characteristics and the sliding performance of the prototype stage are measured and discussed.
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fullrecord <record><control><sourceid>crossref</sourceid><recordid>TN_cdi_crossref_primary_10_1143_JJAP_44_4662</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>10_1143_JJAP_44_4662</sourcerecordid><originalsourceid>FETCH-LOGICAL-c357t-688843704680931e60ceac470198d951ad29e74043c1f1d93c7848fdfd0b25793</originalsourceid><addsrcrecordid>eNot0M1KxDAYheEgCtbRnReQC7A1ab7mZ1lGRx2KDuisQ8zPWKmNJEGZu9dBV4d3cxYPQpeUNJQCu16v-00D0ADn7RGqKANRA-HdMaoIaWkNqm1P0VnO77_JO6AVWvV4iN_1JsUwTh7f-DzuZhxiwuXN48c42zgXYwveTiWZHOfRmmna48F_jcUU7_BzMTt_jk6CmbK_-N8F2q5uX5b39fB097Dsh9qyTpSaSymBCQJcEsWo58R6Y0EQqqRTHTWuVV4AAWZpoE4xKyTI4IIjr20nFFugq79fm2LOyQf9mcYPk_aaEn0w0AcDDaAPBuwHP75NwA</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype></control><display><type>article</type><title>A Low-Profile Design for the Noncontact Ultrasonically Levitated Stage</title><source>Institute of Physics Journals</source><creator>Ide, Takeshi ; Friend, James Robert ; Nakamura, Kentaro ; Ueha, Sadayuki</creator><creatorcontrib>Ide, Takeshi ; Friend, James Robert ; Nakamura, Kentaro ; Ueha, Sadayuki</creatorcontrib><description>In this paper, we propose a new low-profile design for a linear bearing based on Near-Field Acoustic Levitation (NFAL). Two flat beams at a 45° angle are used as a guide rail, and a slider is levitated by ultrasonic bending vibrations excited along the beams. The beams are excited by a pair of Langevin transducers with “+”-shaped vibration direction converters (L-L converters) to install the transducers in the same plane of the beam and to lower the total height of the setup. First, the design of the vibration converter is described. Then, a two-phase driving system to excite a traveling wave is investigated theoretically and experimentally. The levitation characteristics and the sliding performance of the prototype stage are measured and discussed.</description><identifier>ISSN: 0021-4922</identifier><identifier>EISSN: 1347-4065</identifier><identifier>DOI: 10.1143/JJAP.44.4662</identifier><language>eng</language><ispartof>Japanese Journal of Applied Physics, 2005-06, Vol.44 (6S), p.4662</ispartof><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c357t-688843704680931e60ceac470198d951ad29e74043c1f1d93c7848fdfd0b25793</citedby><cites>FETCH-LOGICAL-c357t-688843704680931e60ceac470198d951ad29e74043c1f1d93c7848fdfd0b25793</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,776,780,27901,27902</link.rule.ids></links><search><creatorcontrib>Ide, Takeshi</creatorcontrib><creatorcontrib>Friend, James Robert</creatorcontrib><creatorcontrib>Nakamura, Kentaro</creatorcontrib><creatorcontrib>Ueha, Sadayuki</creatorcontrib><title>A Low-Profile Design for the Noncontact Ultrasonically Levitated Stage</title><title>Japanese Journal of Applied Physics</title><description>In this paper, we propose a new low-profile design for a linear bearing based on Near-Field Acoustic Levitation (NFAL). Two flat beams at a 45° angle are used as a guide rail, and a slider is levitated by ultrasonic bending vibrations excited along the beams. The beams are excited by a pair of Langevin transducers with “+”-shaped vibration direction converters (L-L converters) to install the transducers in the same plane of the beam and to lower the total height of the setup. First, the design of the vibration converter is described. Then, a two-phase driving system to excite a traveling wave is investigated theoretically and experimentally. The levitation characteristics and the sliding performance of the prototype stage are measured and discussed.</description><issn>0021-4922</issn><issn>1347-4065</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2005</creationdate><recordtype>article</recordtype><recordid>eNot0M1KxDAYheEgCtbRnReQC7A1ab7mZ1lGRx2KDuisQ8zPWKmNJEGZu9dBV4d3cxYPQpeUNJQCu16v-00D0ADn7RGqKANRA-HdMaoIaWkNqm1P0VnO77_JO6AVWvV4iN_1JsUwTh7f-DzuZhxiwuXN48c42zgXYwveTiWZHOfRmmna48F_jcUU7_BzMTt_jk6CmbK_-N8F2q5uX5b39fB097Dsh9qyTpSaSymBCQJcEsWo58R6Y0EQqqRTHTWuVV4AAWZpoE4xKyTI4IIjr20nFFugq79fm2LOyQf9mcYPk_aaEn0w0AcDDaAPBuwHP75NwA</recordid><startdate>20050601</startdate><enddate>20050601</enddate><creator>Ide, Takeshi</creator><creator>Friend, James Robert</creator><creator>Nakamura, Kentaro</creator><creator>Ueha, Sadayuki</creator><scope>AAYXX</scope><scope>CITATION</scope></search><sort><creationdate>20050601</creationdate><title>A Low-Profile Design for the Noncontact Ultrasonically Levitated Stage</title><author>Ide, Takeshi ; Friend, James Robert ; Nakamura, Kentaro ; Ueha, Sadayuki</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c357t-688843704680931e60ceac470198d951ad29e74043c1f1d93c7848fdfd0b25793</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2005</creationdate><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Ide, Takeshi</creatorcontrib><creatorcontrib>Friend, James Robert</creatorcontrib><creatorcontrib>Nakamura, Kentaro</creatorcontrib><creatorcontrib>Ueha, Sadayuki</creatorcontrib><collection>CrossRef</collection><jtitle>Japanese Journal of Applied Physics</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Ide, Takeshi</au><au>Friend, James Robert</au><au>Nakamura, Kentaro</au><au>Ueha, Sadayuki</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>A Low-Profile Design for the Noncontact Ultrasonically Levitated Stage</atitle><jtitle>Japanese Journal of Applied Physics</jtitle><date>2005-06-01</date><risdate>2005</risdate><volume>44</volume><issue>6S</issue><spage>4662</spage><pages>4662-</pages><issn>0021-4922</issn><eissn>1347-4065</eissn><abstract>In this paper, we propose a new low-profile design for a linear bearing based on Near-Field Acoustic Levitation (NFAL). Two flat beams at a 45° angle are used as a guide rail, and a slider is levitated by ultrasonic bending vibrations excited along the beams. The beams are excited by a pair of Langevin transducers with “+”-shaped vibration direction converters (L-L converters) to install the transducers in the same plane of the beam and to lower the total height of the setup. First, the design of the vibration converter is described. Then, a two-phase driving system to excite a traveling wave is investigated theoretically and experimentally. The levitation characteristics and the sliding performance of the prototype stage are measured and discussed.</abstract><doi>10.1143/JJAP.44.4662</doi></addata></record>
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url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-04T16%3A28%3A14IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-crossref&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=A%20Low-Profile%20Design%20for%20the%20Noncontact%20Ultrasonically%20Levitated%20Stage&rft.jtitle=Japanese%20Journal%20of%20Applied%20Physics&rft.au=Ide,%20Takeshi&rft.date=2005-06-01&rft.volume=44&rft.issue=6S&rft.spage=4662&rft.pages=4662-&rft.issn=0021-4922&rft.eissn=1347-4065&rft_id=info:doi/10.1143/JJAP.44.4662&rft_dat=%3Ccrossref%3E10_1143_JJAP_44_4662%3C/crossref%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true