Theoretical Investigation into Effects of Pore Size and Pore Position Distributions on Dielectric Constant and Elastic Modulus of Two-Dimensional Periodic Porous Silica Films

The effects of the pore size distribution ( psd ) and pore position distribution ( ppd ) of two-dimensional (2D) periodic porous silica films on dielectric constant ( k ) and elastic modulus ( E ) were investigated by theoretical calculations. It was found that such porous silica films with a wider psd or a wider ppd show lower E value than 2D hexagonal periodic porous silica films with an identical pore size. Careful control of pore structure is necessary for obtaining ultralow- k porous silica films with a high E .