Reduction in Feedback Bandwidth of the Force-Controlled Atomic Force Microscope Using a Polyimide Cantilever

In this paper we present a method of reducing the bandwidth required in the force-controlled atomic force microscope (AFM) for measuring the force curves. System stability strongly depends on the quality factor of vibration ( Q ) of the cantilever. As polyimide has a low Q , a cantilever fabricated...

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Veröffentlicht in:	Japanese Journal of Applied Physics 2001-11, Vol.40 (11R), p.6594
Hauptverfasser:	Kato, Nobuhiro, Matsumoto, Toshiro, Kikuta, Hisao, Nakamura, Yasuhiro, Iwata, Koichi
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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