A Soft-X-Ray Imaging Microscope with a Multilayer-Coated Schwarzschild Objective: Imaging Tests

A Soft-X-Ray Imaging Microscope with a Multilayer-Coated Schwarzschild Objective: Imaging Tests

We constructed a soft-X-ray imaging microscope based on a multilayer-coated Schwarzschild objective. It provides an element-sensitive image in terms of the characteristic soft X-rays selectively reflected by the multilayer coating. The Schwarzschild objective was designed to have a 50× magnification...

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Veröffentlicht in:Japanese Journal of Applied Physics 2000-04, Vol.39 (4R), p.1926
Hauptverfasser: Toyoda, Mitsunori, Shitani, Yoshitaka, Yanagihara, Mihiro, Ejima, Takeo, Yamamoto, Masaki, Watanabe, Makoto
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container_issue 4R
container_start_page 1926
container_title Japanese Journal of Applied Physics
container_volume 39
creator Toyoda, Mitsunori
Shitani, Yoshitaka
Yanagihara, Mihiro
Ejima, Takeo
Yamamoto, Masaki
Watanabe, Makoto
description We constructed a soft-X-ray imaging microscope based on a multilayer-coated Schwarzschild objective. It provides an element-sensitive image in terms of the characteristic soft X-rays selectively reflected by the multilayer coating. The Schwarzschild objective was designed to have a 50× magnification and a numerical aperture of 0.25. The mirrors of the objective were coated with Mo/Si multilayers to reflect the Si L emission. The overall throughput of the objective was 14% at a peak wavelength of 13.3 nm. The 5-µm-wide stripe of lithographically patterned SiO 2 was observed under irradiation with an electron beam of 1 µA accelerated to 2.5 kV.
doi_str_mv 10.1143/JJAP.39.1926
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title A Soft-X-Ray Imaging Microscope with a Multilayer-Coated Schwarzschild Objective: Imaging Tests
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