Optimization of Al-doped ZnO Window Layers for Large-Area Cu(InGa)Se 2 -Based Modules by RF/DC/DC Multiple Magnetron Sputtering
In this report, a comparative study of physical properties of the multilayered ZnO:Al films prepared by a combination of RF and DC magnetron sputtering is presented. It has been found that a RF/DC/DC trilayered system consisting of a thin RF-sputtered ZnO:Al bottom layer with two identical DC-sputte...
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Veröffentlicht in: | Japanese Journal of Applied Physics 1999-11, Vol.38 (11R), p.6213 |
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Hauptverfasser: | , , , , , , |
Format: | Artikel |
Sprache: | eng |
Online-Zugang: | Volltext |
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