Optimization of Al-doped ZnO Window Layers for Large-Area Cu(InGa)Se 2 -Based Modules by RF/DC/DC Multiple Magnetron Sputtering

In this report, a comparative study of physical properties of the multilayered ZnO:Al films prepared by a combination of RF and DC magnetron sputtering is presented. It has been found that a RF/DC/DC trilayered system consisting of a thin RF-sputtered ZnO:Al bottom layer with two identical DC-sputte...

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Veröffentlicht in:Japanese Journal of Applied Physics 1999-11, Vol.38 (11R), p.6213
Hauptverfasser: Cooray, Nawalage F., Kushiya, Katsumi, Fujimaki, Atsushi, Okumura, Daisuke, Sato, Masao, Ooshita, Mineo, Yamase, Osamu
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Sprache:eng
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