Improved Automatic Alignment of Pinhole Integrated with Photodiode

The spatial filter of a Si micromachined pinhole integrated with photodiodes is fabricated. The photodiode cells placed around the center pinhole can detect the relative position between the incident beam spot and the pinhole. The automatic alignment of the pinhole was realized using a feedback cont...

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Veröffentlicht in:	Japanese Journal of Applied Physics 1998-12, Vol.37 (12S), p.7120
Hauptverfasser:	Minoru Sasaki, Minoru Sasaki, Yuji Arai, Yuji Arai, Wataru Kamada, Wataru Kamada, Kazuhiro Hane, Kazuhiro Hane
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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