Analysis of columnar microstructure in Fe-N thin films prepared by an ion-assisted vapor deposition method

Iron nitride thin film was produced through an ion-assisted evaporation process. After structural and elemental analyses using X-ray diffraction and energy dispersion X-ray spectroscopy it was judged that the film is ε -Fe 3 N. It was found that this film consists of straight columns. Moreover, an X-ray line analysis across the columnar direction clarified that the sides of the columns are oxidized. In addition, the electron diffraction patterns obtained suggest that the c -axis of ε -Fe 3 N (hexagonal) is in line with the direction of the columns.