Preparation and Electrochromism of RF-Sputtered TiO 2 Films

Titanium oxide ( TiO 2 ) thin films were prepared by rf-sputtering in an Ar/O 2 atmosphere from a compressed powder TiO 2 target and their electrochromic (EC) phenomena were investigated. Films prepared under the sputtering pressures of 1.3, 4.0 and 6.7 Pa were confirmed by X-ray diffraction to be i...

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Veröffentlicht in:	Japanese Journal of Applied Physics 1997-07, Vol.36 (7R), p.4423
Hauptverfasser:	Kitao, Michihiko, Yoshihiro Oshima, Yoshihiro Oshima, Kazuo Urabe, Kazuo Urabe
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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