Formation of a Lead Zirconate Titanate (PZT)/Pt Interfacial Layer and Structural Changes in the Pt/Ti/SiO 2 /Si Substrate during the Deposition of PZT Thin Film by Electron Cyclotron Resonance Plasma-Enhanced Chemical Vapor Deposition

Lead zirconate titanate (PZT) thin films were fabricated on Pt(70 nm)/Ti(100 nm)/SiO 2 /Si substrates at 470°C by electron cyclotron resonance plasma-enhanced chemical vapor deposition (ECR PECVD). A Pb-deficient interfacial layer approximately 25 nm thick was found between the PZT film and the Pt s...

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Veröffentlicht in:	Japanese Journal of Applied Physics 1997-07, Vol.36 (7R), p.4386
Hauptverfasser:	Whan Kim, Su-Ock Chung, Hong Kim, Geun, Chong Ook Park, Chong Ook Park, Won Jong Lee, Won Jong Lee
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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