Experimental surface acoustic wave properties of AlN thin films on sapphire substrates

Experimental surface acoustic wave properties of AlN thin films on sapphire substrates

Equivalent circuit model parameters of Rayleigh propagation along the [001] axis of AlN (110) thin films synthesized using chemical vapor deposition on a sapphire R-plane were measured. The electro-mechanical coupling constant was 0.63% at k h ≧2, and the static capacitance was 46.3 pF/m in the case...

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Veröffentlicht in:Japanese Journal of Applied Physics 1997, Vol.36 (1A), p.307-312
Hauptverfasser: KAYA, K, TAKAHASHI, H, SHIBATA, Y, KANNO, Y, HIRAI, T
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Sprache:eng
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Acoustoelectric effects and surface acoustic waves (saw) in piezoelectrics
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Dielectrics, piezoelectrics, and ferroelectrics and their properties
Exact sciences and technology
Physics
Piezoelectricity and electromechanical effects
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container_end_page 312
container_issue 1A
container_start_page 307
container_title Japanese Journal of Applied Physics
container_volume 36
creator KAYA, K
TAKAHASHI, H
SHIBATA, Y
KANNO, Y
HIRAI, T
description Equivalent circuit model parameters of Rayleigh propagation along the [001] axis of AlN (110) thin films synthesized using chemical vapor deposition on a sapphire R-plane were measured. The electro-mechanical coupling constant was 0.63% at k h ≧2, and the static capacitance was 46.3 pF/m in the case that the line/space ratio was unity. The acoustic impedance and the normalized susceptance were obtained as a function of wavelength of surface acoustic wave for various line/space ratios.
doi_str_mv 10.1143/JJAP.36.307
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source IOP Publishing Journals; Institute of Physics (IOP) Journals - HEAL-Link
subjects Acoustoelectric effects and surface acoustic waves (saw) in piezoelectrics
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Dielectrics, piezoelectrics, and ferroelectrics and their properties
Exact sciences and technology
Physics
Piezoelectricity and electromechanical effects
title Experimental surface acoustic wave properties of AlN thin films on sapphire substrates
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