RF hollow cathode discharges with tapered shape

A hollow cathode with tapered shape (HCT) is developed in order to expand the range of operating pressures. Although the plasma density produced by the HCT becomes slightly lower than that by an ordinary hollow cathode, it is demonstrated experimentally that the range of operating pressures for stab...

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Veröffentlicht in:	Japanese Journal of Applied Physics 1996-06, Vol.35 (6A), p.L729-L730
Hauptverfasser:	FUKUDA, T, MATSUOKA, A, KONDOH, Y, SUGAWARA, M
Format:	Artikel
Sprache:	eng
Schlagworte:	Electric discharges Exact sciences and technology Glow corona Physics Physics of gases, plasmas and electric discharges Physics of plasmas and electric discharges Plasma applications
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container_title	Japanese Journal of Applied Physics
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creator	FUKUDA, T MATSUOKA, A KONDOH, Y SUGAWARA, M
description	A hollow cathode with tapered shape (HCT) is developed in order to expand the range of operating pressures. Although the plasma density produced by the HCT becomes slightly lower than that by an ordinary hollow cathode, it is demonstrated experimentally that the range of operating pressures for stable RF hollow cathode discharge is expanded. It is shown that the position of the negative glow moves inside the HCT for different operating pressures to sustain the hollow cathode discharge.
doi_str_mv	10.1143/jjap.35.l729
format	Article
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Although the plasma density produced by the HCT becomes slightly lower than that by an ordinary hollow cathode, it is demonstrated experimentally that the range of operating pressures for stable RF hollow cathode discharge is expanded. It is shown that the position of the negative glow moves inside the HCT for different operating pressures to sustain the hollow cathode discharge.</abstract><cop>Tokyo</cop><pub>Japanese journal of applied physics</pub><doi>10.1143/jjap.35.l729</doi></addata></record>
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source	IOP Publishing Journals; Institute of Physics (IOP) Journals - HEAL-Link
subjects	Electric discharges Exact sciences and technology Glow corona Physics Physics of gases, plasmas and electric discharges Physics of plasmas and electric discharges Plasma applications
title	RF hollow cathode discharges with tapered shape
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