Proposal of new interconnection technique for very high-voltage IC's

A new, cost-effective, high-voltage interconnection technique for very high-voltage IC's, called the “self-shielding technique”, is proposed. To avoid reduction of the breakdown voltage of high-voltage devices due to the electric potential of overlying interconnections, only the self-PN-junctio...

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Veröffentlicht in:	Japanese Journal of Applied Physics 1996-11, Vol.35 (11), p.5655-5663
Hauptverfasser:	FUJIHIRA, T, YANO, Y, OBINATA, S, KUMAGAI, N, SAKURAI, K
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Electronics Exact sciences and technology Microelectronic fabrication (materials and surfaces technology) Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Online-Zugang:	Volltext
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