Light emission from nanometer-sized silicon particles fabricated by the laser ablation method

Luminescent nanometer-sized silicon particles are fabricated by laser ablation of a silicon target in helium gas. The formation of products is found to be governed by the dynamics of the laser-ablated silicon particles in the gas. The products deposited on silicon substrates exhibit light emission w...

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Veröffentlicht in:Japanese Journal of Applied Physics 1996-09, Vol.35 (9A), p.4780-4784
Hauptverfasser: MAKIMURA, T, KUNII, Y, MURAKAMI, K
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container_issue 9A
container_start_page 4780
container_title Japanese Journal of Applied Physics
container_volume 35
creator MAKIMURA, T
KUNII, Y
MURAKAMI, K
description Luminescent nanometer-sized silicon particles are fabricated by laser ablation of a silicon target in helium gas. The formation of products is found to be governed by the dynamics of the laser-ablated silicon particles in the gas. The products deposited on silicon substrates exhibit light emission with a peak at 1.6 eV in the air, while 2.1 eV after annealing for 20 min at 800°C in oxygen gas. Applying the laser ablation technique, we demonstrate a novel technique for fabricating silicon particles embedded in a silicon dioxide film. The particles also exhibit visible light emission.
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source Institute of Physics Journals
subjects Amorphous semiconductors
glasses
Amorphous semiconductors
glasses
nanocrystalline materials
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Elemental semiconductors
Exact sciences and technology
Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation
Optical properties of specific thin films
Photoluminescence
Physics
title Light emission from nanometer-sized silicon particles fabricated by the laser ablation method
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