Anisotropic diffusion of Si adsorbates on a Si(001) surface

The behavior of Si adsorbates evaporated on a Si(001) surface is studied by tracing their diffusion caused by radiative heating. A reflection electron microscope (REM) is used to observe denuded zones that are created at the terrace edge and grow with heating time. Diffusion constants of Si adsorbat...

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Veröffentlicht in:Japanese Journal of Applied Physics 1995-07, Vol.34 (7A), p.3637-3641
Hauptverfasser: DOI, T, ICHIKAWA, M
Format: Artikel
Sprache:eng
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