Character projection EB data conversion system combined with throughput analyzer

An electron beam (EB) data conversion system for a character projection (CP) writing method has been constructed. The system has been developed based on an EB data conversion system for a variable-shaped beam (VSB), and a formatting module for CP writing was added. In addition, several functions hav...

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Bibliographische Detailangaben

Veröffentlicht in:	Japanese Journal of Applied Physics 1994-12, Vol.33 (12B), p.6935-6939
Hauptverfasser:	HARA, S, MAGOSHI, S, KOYAMA, K
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Electronics Exact sciences and technology Microelectronic fabrication (materials and surfaces technology) Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Online-Zugang:	Volltext
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