Symmetric magnetic doublet optics with dynamically compensated field aberration for reducing image projection system

Aberrations calculated from the electron trajectories are compared with those estimated from the third-order aberration coefficients. Field curvature and radial and azimuthal distortions are consistent with each other for moderate radial value R . In order to optimize lens positions, a method is ado...

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Veröffentlicht in:	Japanese Journal of Applied Physics 1994, Vol.33 (9A), p.5086-5093
Hauptverfasser:	NAKASUJI, M, SHIMIZU, H, OKINO, T
Format:	Artikel
Sprache:	eng
Schlagworte:	Aberrations Exact sciences and technology Fundamental areas of phenomenology (including applications) Geometrical optics Imaging and optical processing Optics Physics
Online-Zugang:	Volltext
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