Evaporation of oxygen-bearing species from Si melt and influence of Sb addition

Evaporation loss from undoped and Sb-doped Si melt in both SiC-coated carbon and a silica crucible was measured in the temperature range of 1440–1560° C. For undoped Si melt in a silica crucible, the evaporation rate changed with temperature in an exponential manner and depended on the area ratio, A...

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Veröffentlicht in:	Japanese Journal of Applied Physics 1994, Vol.33 (4A), p.1717-1722
Hauptverfasser:	XIMING HUANG, TERASHIMA, K, SASAKI, H, TOKIZAKI, E, ANZAI, Y, KIMURA, S
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: structure, mechanical and thermal properties Equations of state, phase equilibria, and phase transitions Exact sciences and technology Liquid-vapor transitions Physics Specific phase transitions
Online-Zugang:	Volltext
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