X-Ray Chemical Analysis of an YBa 2 Cu 3 O x Thin Film by Scanning Electron Microscopy and Total-Reflection-Angle X-Ray Spectroscopy (SEM-TRAXS)
Scanning electron microscopy and total-reflection-angle X-ray spectroscopy (SEM-TRAXS) were applied to X-ray chemical analysis of a 1000 Å-thick YBa 2 Cu 3 O x (YBCO) film on an MgO substrate. The intensity of the characteristic X-rays emitted from the YBCO thin film varied as a function of the take...
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| Veröffentlicht in: | Japanese Journal of Applied Physics 1991-12, Vol.30 (12A), p.L2032 |
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| container_issue | 12A |
| container_start_page | L2032 |
| container_title | Japanese Journal of Applied Physics |
| container_volume | 30 |
| creator | Usui, Toshio Aoki, Yuji Kamei, Masayuki Takahashi, Hiromi Tadataka Morishita, Tadataka Morishita Shoji Tanaka, Shoji Tanaka |
| description | Scanning electron microscopy and total-reflection-angle X-ray spectroscopy (SEM-TRAXS) were applied to X-ray chemical analysis of a 1000 Å-thick YBa
2
Cu
3
O
x
(YBCO) film on an MgO substrate. The intensity of the characteristic X-rays emitted from the YBCO thin film varied as a function of the take-off angle (θ
t
) with respect to the film surface. The intensity of higher-energy X-rays of BaL lines and CuK lines was almost constant against the θ
t
over the wide range of 0°-30°, but that of lower-energy X-rays of YL
α
, CuL
α
and OK
α
lines depends strongly on the θ
t
up to 10°, and then slightly increases with the θ
t
. |
| doi_str_mv | 10.1143/JJAP.30.L2032 |
| format | Article |
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2
Cu
3
O
x
(YBCO) film on an MgO substrate. The intensity of the characteristic X-rays emitted from the YBCO thin film varied as a function of the take-off angle (θ
t
) with respect to the film surface. The intensity of higher-energy X-rays of BaL lines and CuK lines was almost constant against the θ
t
over the wide range of 0°-30°, but that of lower-energy X-rays of YL
α
, CuL
α
and OK
α
lines depends strongly on the θ
t
up to 10°, and then slightly increases with the θ
t
.</description><identifier>ISSN: 0021-4922</identifier><identifier>EISSN: 1347-4065</identifier><identifier>DOI: 10.1143/JJAP.30.L2032</identifier><language>eng</language><ispartof>Japanese Journal of Applied Physics, 1991-12, Vol.30 (12A), p.L2032</ispartof><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c822-103e80e81c7ff357aaa11c38113224d920e6136dbb0cc60745fd6fde83a183c3</citedby><cites>FETCH-LOGICAL-c822-103e80e81c7ff357aaa11c38113224d920e6136dbb0cc60745fd6fde83a183c3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,780,784,27922,27923</link.rule.ids></links><search><creatorcontrib>Usui, Toshio</creatorcontrib><creatorcontrib>Aoki, Yuji</creatorcontrib><creatorcontrib>Kamei, Masayuki</creatorcontrib><creatorcontrib>Takahashi, Hiromi</creatorcontrib><creatorcontrib>Tadataka Morishita, Tadataka Morishita</creatorcontrib><creatorcontrib>Shoji Tanaka, Shoji Tanaka</creatorcontrib><title>X-Ray Chemical Analysis of an YBa 2 Cu 3 O x Thin Film by Scanning Electron Microscopy and Total-Reflection-Angle X-Ray Spectroscopy (SEM-TRAXS)</title><title>Japanese Journal of Applied Physics</title><description>Scanning electron microscopy and total-reflection-angle X-ray spectroscopy (SEM-TRAXS) were applied to X-ray chemical analysis of a 1000 Å-thick YBa
2
Cu
3
O
x
(YBCO) film on an MgO substrate. The intensity of the characteristic X-rays emitted from the YBCO thin film varied as a function of the take-off angle (θ
t
) with respect to the film surface. The intensity of higher-energy X-rays of BaL lines and CuK lines was almost constant against the θ
t
over the wide range of 0°-30°, but that of lower-energy X-rays of YL
α
, CuL
α
and OK
α
lines depends strongly on the θ
t
up to 10°, and then slightly increases with the θ
t
.</description><issn>0021-4922</issn><issn>1347-4065</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>1991</creationdate><recordtype>article</recordtype><recordid>eNotkM1OwzAQhC0EEqVw5L5HOLjY3vz1GKIWqFoVNTmUU-Q6dmuUOlVcJPIWPDIN5TRazczu6iPknrMR5wE-zWbp-wjZaC4Yigsy4BjENGBReEkGjAlOg7EQ1-TG-8_TGIUBH5CfNV3JDrKd3lsla0idrDtvPTQGpIOPZwkCsi9AWMI3FDvrYGrrPWw6yJV0zrotTGqtjm3jYGFV23jVHLpTt4KiOcqarrTpfds4mrptreF8MT_8lc7ph3yyoMUqXeePt-TKyNrru38dknw6KbJXOl--vGXpnKpECMoZ6oTphKvYGAxjKSXnChPOUYigGgumI45RtdkwpSIWB6GpIlPpBCVPUOGQ0PPW_mHfalMeWruXbVdyVvYwyx5miaz8g4m_xyBlrQ</recordid><startdate>19911201</startdate><enddate>19911201</enddate><creator>Usui, Toshio</creator><creator>Aoki, Yuji</creator><creator>Kamei, Masayuki</creator><creator>Takahashi, Hiromi</creator><creator>Tadataka Morishita, Tadataka Morishita</creator><creator>Shoji Tanaka, Shoji Tanaka</creator><scope>AAYXX</scope><scope>CITATION</scope></search><sort><creationdate>19911201</creationdate><title>X-Ray Chemical Analysis of an YBa 2 Cu 3 O x Thin Film by Scanning Electron Microscopy and Total-Reflection-Angle X-Ray Spectroscopy (SEM-TRAXS)</title><author>Usui, Toshio ; Aoki, Yuji ; Kamei, Masayuki ; Takahashi, Hiromi ; Tadataka Morishita, Tadataka Morishita ; Shoji Tanaka, Shoji Tanaka</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c822-103e80e81c7ff357aaa11c38113224d920e6136dbb0cc60745fd6fde83a183c3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>1991</creationdate><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Usui, Toshio</creatorcontrib><creatorcontrib>Aoki, Yuji</creatorcontrib><creatorcontrib>Kamei, Masayuki</creatorcontrib><creatorcontrib>Takahashi, Hiromi</creatorcontrib><creatorcontrib>Tadataka Morishita, Tadataka Morishita</creatorcontrib><creatorcontrib>Shoji Tanaka, Shoji Tanaka</creatorcontrib><collection>CrossRef</collection><jtitle>Japanese Journal of Applied Physics</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Usui, Toshio</au><au>Aoki, Yuji</au><au>Kamei, Masayuki</au><au>Takahashi, Hiromi</au><au>Tadataka Morishita, Tadataka Morishita</au><au>Shoji Tanaka, Shoji Tanaka</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>X-Ray Chemical Analysis of an YBa 2 Cu 3 O x Thin Film by Scanning Electron Microscopy and Total-Reflection-Angle X-Ray Spectroscopy (SEM-TRAXS)</atitle><jtitle>Japanese Journal of Applied Physics</jtitle><date>1991-12-01</date><risdate>1991</risdate><volume>30</volume><issue>12A</issue><spage>L2032</spage><pages>L2032-</pages><issn>0021-4922</issn><eissn>1347-4065</eissn><abstract>Scanning electron microscopy and total-reflection-angle X-ray spectroscopy (SEM-TRAXS) were applied to X-ray chemical analysis of a 1000 Å-thick YBa
2
Cu
3
O
x
(YBCO) film on an MgO substrate. The intensity of the characteristic X-rays emitted from the YBCO thin film varied as a function of the take-off angle (θ
t
) with respect to the film surface. The intensity of higher-energy X-rays of BaL lines and CuK lines was almost constant against the θ
t
over the wide range of 0°-30°, but that of lower-energy X-rays of YL
α
, CuL
α
and OK
α
lines depends strongly on the θ
t
up to 10°, and then slightly increases with the θ
t
.</abstract><doi>10.1143/JJAP.30.L2032</doi></addata></record> |
| fulltext | fulltext |
| identifier | ISSN: 0021-4922 |
| ispartof | Japanese Journal of Applied Physics, 1991-12, Vol.30 (12A), p.L2032 |
| issn | 0021-4922 1347-4065 |
| language | eng |
| recordid | cdi_crossref_primary_10_1143_JJAP_30_L2032 |
| source | IOP Publishing Journals; Institute of Physics (IOP) Journals - HEAL-Link |
| title | X-Ray Chemical Analysis of an YBa 2 Cu 3 O x Thin Film by Scanning Electron Microscopy and Total-Reflection-Angle X-Ray Spectroscopy (SEM-TRAXS) |
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