Effects of Phosphine-Plasma Treatment on Characteristics of Au/n-InP Schottky Junctions

The effects of phosphine (PH 3 )-plasma treatment on the characteristics of Au/n-InP Schottky junctions are investigated and compared with those of hydrogen (H 2 )-plasma treatment. An enhancement of the barrier height of as high as 0.7 eV or more is found for Schottky junctions fabricated by the pr...

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Veröffentlicht in:	Japanese Journal of Applied Physics 1991-08, Vol.30 (8B), p.L1439
Hauptverfasser:	Sugino, Takashi, Yamamoto, Hiroyuki, Sakamoto, Yoshifumi, Hideaki Ninomiya, Hideaki Ninomiya, Junji Shirafuji, Junji Shirafuji
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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