MOS-type one-dimensional position-sensitive detectors with a linearly detectable face of 30 mm long

Experiments have been conducted for the MOS-type position-sensitive detector (PSD) to make one-dimensional PSDs of large detection range, based on the previous theoretical suggestion that the MOS-type PSD under some conditions linearly detects a light-spot position in the full range of its detectable face. The almost perfect linearity and also fine resolution higher than 1 µm have been demonstrated for an Al-SiO 2 -Si one-dimensional PSD with a detectable face of 30 mm long.