Preparation of High-T c Y-Ba-Cu-O Films by Three-Target Magnetron Sputtering

The mechanism of deviation in the composition of sputtered films from the target was studied using a three-target magnetron sputtering system. Films were prepared in two different deposition geometries: first, the three targets were facing the substrate, and second, they were turned far away from th...

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Veröffentlicht in:	Japanese Journal of Applied Physics 1990-04, Vol.29 (4A), p.L604
Hauptverfasser:	Akutsu, Nakao, Fukutomi, Masao, Katoh, Kazuhiko, Takahara, Hidefusa, Tanaka, Yoshiaki, Asano, Toshihisa, Maeda, Hiroshi
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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