Effects of Substrate Heating on the Amorphous Structure of InGaZnO Films and the Electrical Properties of Their Thin Film Transistors

This study examines the effects of substrate heating on the amorphous structure of InGaZnO 4 (IGZO) films and the device performance of transistors produced from these films. By combining high-resolution transmission electron microscopy (HRTEM) and energy-filtered selected area electron diffraction...

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Veröffentlicht in:	Applied physics express 2010-11, Vol.3 (11), p.111101-111101-3
Hauptverfasser:	Moon, Mi Ran, Na, Sekwon, Jeon, Haseok, An, Chee-Hong, Park, Kyung, Jung, Donggeun, Kim, Hyoungsub, Lee, Young-Boo, Lee, Hoo-Jeong
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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