Synthesis of a Closely Packed Carbon Nanotube Forest by a Multi-Step Growth Method Using Plasma-Based Chemical Vapor Deposition

Synthesis of a Closely Packed Carbon Nanotube Forest by a Multi-Step Growth Method Using Plasma-Based Chemical Vapor Deposition

We report a synthesis of a closely packed multi-walled carbon nanotube (MWCNT) forest by a multi-step growth method, including a new approach to immobilize catalytic nanoparticles, using plasma-based chemical vapor deposition. The CNT packing density reaches one-half of the theoretical value, where...

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Veröffentlicht in:Applied physics express 2010-05, Vol.3 (5), p.055002-055002-3
Hauptverfasser: Yamazaki, Yuichi, Katagiri, Masayuki, Sakuma, Naoshi, Suzuki, Mariko, Sato, Shintaro, Nihei, Mizuhisa, Wada, Makoto, Matsunaga, Noriaki, Sakai, Tadashi, Awano, Yuji
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container_issue 5
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container_title Applied physics express
container_volume 3
creator Yamazaki, Yuichi
Katagiri, Masayuki
Sakuma, Naoshi
Suzuki, Mariko
Sato, Shintaro
Nihei, Mizuhisa
Wada, Makoto
Matsunaga, Noriaki
Sakai, Tadashi
Awano, Yuji
description We report a synthesis of a closely packed multi-walled carbon nanotube (MWCNT) forest by a multi-step growth method, including a new approach to immobilize catalytic nanoparticles, using plasma-based chemical vapor deposition. The CNT packing density reaches one-half of the theoretical value, where the space of 30--40% is filled with MWCNTs. This value is approximately one order of magnitude larger than that of as-grown CNT forest synthesized using conventional methods. The method is applicable even at a spatially restricted region, for example, in trench or via hole, and is available at the growth temperature as low as 450 °C.
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title Synthesis of a Closely Packed Carbon Nanotube Forest by a Multi-Step Growth Method Using Plasma-Based Chemical Vapor Deposition
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