Record Thick κ(ε)-Ga2O3 Epitaxial Layers Grown on GaN/c-Sapphire

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Veröffentlicht in:Technical physics 2023-12, Vol.68 (12), p.689-694
Hauptverfasser: Nikolaev, V. I., Polyakov, A. Ya, Stepanov, S. I., Pechnikov, A. I., Nikolaev, V. V., Yakimov, E. B., Scheglov, M. P., Chikiryaka, A. V., Guzilova, L. I., Timashov, R. B., Shapenkov, S. V., Butenko, P. N.
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container_end_page 694
container_issue 12
container_start_page 689
container_title Technical physics
container_volume 68
creator Nikolaev, V. I.
Polyakov, A. Ya
Stepanov, S. I.
Pechnikov, A. I.
Nikolaev, V. V.
Yakimov, E. B.
Scheglov, M. P.
Chikiryaka, A. V.
Guzilova, L. I.
Timashov, R. B.
Shapenkov, S. V.
Butenko, P. N.
description
doi_str_mv 10.1134/S1063784223080236
format Article
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title Record Thick κ(ε)-Ga2O3 Epitaxial Layers Grown on GaN/c-Sapphire
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