Plasma-dynamic and optical characteristics of magnetron-type cylindrical gas discharge under conditions of titanium nitride film synthesis

The results of comprehensive experimental investigation into the plasma-dynamic and optical characteristics of a magnetron cylindrical gas discharge are reported. Experiments are carried out under computer monitoring of the spectrum radiated by the discharge plasma in the visual range. Optimal condi...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Technical physics 2009-07, Vol.54 (7), p.1052-1057
Hauptverfasser:	Blonskii, I. V., Goncharov, A. A., Demchishin, A. V., Evsyukov, A. N., Kostin, E. G., Sal’nikov, V. A., Tereshchenko, A. G., Tkachenko, L. N.
Format:	Artikel
Sprache:	eng
Schlagworte:	Classical and Continuum Physics Experimental Instruments and Technique Physics Physics and Astronomy
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!