Measurements and calculations of the electron distribution function in the electronegative plasma of a hollow-cathode discharge in N2: SF6 mixtures
Results are presented from measurements and numerical calculations of the electron energy distribution function in the plasma of a hollow-cathode glow discharge in N 2 : SF 6 mixtures. It is shown that, when a small amount of SF 6 is added to nitrogen, the number of electrons in the inverse region o...
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Veröffentlicht in: | Plasma physics reports 2009-11, Vol.35 (10), p.883-889 |
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creator | Tsiolko, V. V. Bazhenov, V. Yu Shchedrin, A. I. Kalyuzhnaya, A. G. |
description | Results are presented from measurements and numerical calculations of the electron energy distribution function in the plasma of a hollow-cathode glow discharge in N
2
: SF
6
mixtures. It is shown that, when a small amount of SF
6
is added to nitrogen, the number of electrons in the inverse region of the distribution function (2–6 eV) increases by about one order of magnitude. As the electric field in plasma increases to ≈0.5 V/cm, the dip in the distribution function disappears and the inversion region vanishes. |
doi_str_mv | 10.1134/S1063780X09100110 |
format | Article |
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2
: SF
6
mixtures. It is shown that, when a small amount of SF
6
is added to nitrogen, the number of electrons in the inverse region of the distribution function (2–6 eV) increases by about one order of magnitude. As the electric field in plasma increases to ≈0.5 V/cm, the dip in the distribution function disappears and the inversion region vanishes.</description><identifier>ISSN: 1063-780X</identifier><identifier>EISSN: 1562-6938</identifier><identifier>DOI: 10.1134/S1063780X09100110</identifier><language>eng</language><publisher>Dordrecht: SP MAIK Nauka/Interperiodica</publisher><subject>Atomic ; Low-Temperature Plasma ; Molecular ; Optical and Plasma Physics ; Physics ; Physics and Astronomy</subject><ispartof>Plasma physics reports, 2009-11, Vol.35 (10), p.883-889</ispartof><rights>Pleiades Publishing, Ltd. 2009</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c2030-bcde08bc09931dad9831940845d5026a28726f10d87895159511801e7ed540173</citedby><cites>FETCH-LOGICAL-c2030-bcde08bc09931dad9831940845d5026a28726f10d87895159511801e7ed540173</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://link.springer.com/content/pdf/10.1134/S1063780X09100110$$EPDF$$P50$$Gspringer$$H</linktopdf><linktohtml>$$Uhttps://link.springer.com/10.1134/S1063780X09100110$$EHTML$$P50$$Gspringer$$H</linktohtml><link.rule.ids>314,776,780,27901,27902,41464,42533,51294</link.rule.ids></links><search><creatorcontrib>Tsiolko, V. V.</creatorcontrib><creatorcontrib>Bazhenov, V. Yu</creatorcontrib><creatorcontrib>Shchedrin, A. I.</creatorcontrib><creatorcontrib>Kalyuzhnaya, A. G.</creatorcontrib><title>Measurements and calculations of the electron distribution function in the electronegative plasma of a hollow-cathode discharge in N2: SF6 mixtures</title><title>Plasma physics reports</title><addtitle>Plasma Phys. Rep</addtitle><description>Results are presented from measurements and numerical calculations of the electron energy distribution function in the plasma of a hollow-cathode glow discharge in N
2
: SF
6
mixtures. It is shown that, when a small amount of SF
6
is added to nitrogen, the number of electrons in the inverse region of the distribution function (2–6 eV) increases by about one order of magnitude. As the electric field in plasma increases to ≈0.5 V/cm, the dip in the distribution function disappears and the inversion region vanishes.</description><subject>Atomic</subject><subject>Low-Temperature Plasma</subject><subject>Molecular</subject><subject>Optical and Plasma Physics</subject><subject>Physics</subject><subject>Physics and Astronomy</subject><issn>1063-780X</issn><issn>1562-6938</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2009</creationdate><recordtype>article</recordtype><recordid>eNp9kE1OwzAQhS0EEqVwAHa-QGAmvw47VFFAKrAoSOwi1540qVK7shN-zsGFcYANQmIxmpHe-56ehrFThDPEJD1fIuRJIeAZSgRAhD02wSyPo7xMxH64gxyN-iE78n4zWkSGE_ZxR9IPjrZkes-l0VzJTg2d7FtrPLc17xvi1JHqnTVct7537WoYVV4PRn0drfnlonWgX4jvOum3csyQvLFdZ18jJfvGahpzVCPdmkb2Pr7gy3nOt-1bH6r4Y3ZQy87Tyc-esqf51ePsJlo8XN_OLheRiiGBaKU0gVgpKMsEtdSlSLBMQaSZziDOZSyKOK8RtChEmWEWBgUgFaSzFLBIpgy_c5Wz3juqq51rt9K9VwjV-NXqz1cDE38zPnjNmly1sYMzoeY_0Cc4FXr7</recordid><startdate>200911</startdate><enddate>200911</enddate><creator>Tsiolko, V. V.</creator><creator>Bazhenov, V. Yu</creator><creator>Shchedrin, A. I.</creator><creator>Kalyuzhnaya, A. G.</creator><general>SP MAIK Nauka/Interperiodica</general><scope>AAYXX</scope><scope>CITATION</scope></search><sort><creationdate>200911</creationdate><title>Measurements and calculations of the electron distribution function in the electronegative plasma of a hollow-cathode discharge in N2: SF6 mixtures</title><author>Tsiolko, V. V. ; Bazhenov, V. Yu ; Shchedrin, A. I. ; Kalyuzhnaya, A. G.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c2030-bcde08bc09931dad9831940845d5026a28726f10d87895159511801e7ed540173</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2009</creationdate><topic>Atomic</topic><topic>Low-Temperature Plasma</topic><topic>Molecular</topic><topic>Optical and Plasma Physics</topic><topic>Physics</topic><topic>Physics and Astronomy</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Tsiolko, V. V.</creatorcontrib><creatorcontrib>Bazhenov, V. Yu</creatorcontrib><creatorcontrib>Shchedrin, A. I.</creatorcontrib><creatorcontrib>Kalyuzhnaya, A. G.</creatorcontrib><collection>CrossRef</collection><jtitle>Plasma physics reports</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Tsiolko, V. V.</au><au>Bazhenov, V. Yu</au><au>Shchedrin, A. I.</au><au>Kalyuzhnaya, A. G.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Measurements and calculations of the electron distribution function in the electronegative plasma of a hollow-cathode discharge in N2: SF6 mixtures</atitle><jtitle>Plasma physics reports</jtitle><stitle>Plasma Phys. Rep</stitle><date>2009-11</date><risdate>2009</risdate><volume>35</volume><issue>10</issue><spage>883</spage><epage>889</epage><pages>883-889</pages><issn>1063-780X</issn><eissn>1562-6938</eissn><abstract>Results are presented from measurements and numerical calculations of the electron energy distribution function in the plasma of a hollow-cathode glow discharge in N
2
: SF
6
mixtures. It is shown that, when a small amount of SF
6
is added to nitrogen, the number of electrons in the inverse region of the distribution function (2–6 eV) increases by about one order of magnitude. As the electric field in plasma increases to ≈0.5 V/cm, the dip in the distribution function disappears and the inversion region vanishes.</abstract><cop>Dordrecht</cop><pub>SP MAIK Nauka/Interperiodica</pub><doi>10.1134/S1063780X09100110</doi><tpages>7</tpages></addata></record> |
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title | Measurements and calculations of the electron distribution function in the electronegative plasma of a hollow-cathode discharge in N2: SF6 mixtures |
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