Synthesis and investigation of new materials in MIS structures for the development of physical foundations of CMOS technologies of nanoelectronics

Certain results of experimental investigations of recent years devoted to new materials of undergate dielectrics and gates for field-effect MOS transistors based on high-k metal oxides and metal layers, respectively, are presented. The laboratory technology of fabrication of a functional field-effec...

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Veröffentlicht in:	Russian microelectronics 2010-06, Vol.39 (3), p.165-174
Hauptverfasser:	Zenkevich, A. V., Lebedinskii, Yu. Yu, Matveev, Yu. A., Barantsev, N. S., Voronov, Yu. A., Sogoyan, A. V., Nevolin, V. N., Chichkov, V. I., Spiga, S., Fanchulli, M.
Format:	Artikel
Sprache:	eng
Schlagworte:	Dynamics of Technological Processes Electrical Engineering Engineering
Online-Zugang:	Volltext
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