Versatile instrument for MOSFET characterization

An instrument is presented for measuring major MOSFET parameters. It implements the method of charge pumping as well as providing static I – V characteristics. The former capability enables one to investigate the quality of semiconductor-insulator interfaces and to determine mean surface-state densi...

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Veröffentlicht in:Russian microelectronics 2008-07, Vol.37 (4), p.277-282
Hauptverfasser: Klekachev, A. V., Kuznetsov, S. N., Pikulev, V. B., Gurtov, V. A.
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container_end_page 282
container_issue 4
container_start_page 277
container_title Russian microelectronics
container_volume 37
creator Klekachev, A. V.
Kuznetsov, S. N.
Pikulev, V. B.
Gurtov, V. A.
description An instrument is presented for measuring major MOSFET parameters. It implements the method of charge pumping as well as providing static I – V characteristics. The former capability enables one to investigate the quality of semiconductor-insulator interfaces and to determine mean surface-state density. Employing a USB-compatible microcontroller, the instrument has a reasonable size (100 × 80 × 50 mm 3 ), mass (300 g), and power consumption (at most 2.5 W). The instrument is controlled via a USB bus by a personal computer running specially designed software under Microsoft® Windows 2000/XP®. It can measure currents from 1 pA to 10 mA with the gate or drain voltage varied across the range ±10 V, the MOSFET under test being connected as a two-port. Mean surface-state densities down to 10 9 cm −2 eV −1 can be determined.
doi_str_mv 10.1134/S1063739708040082
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subjects Circuits and Systems
Electrical Engineering
Engineering
title Versatile instrument for MOSFET characterization
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