The parameters of plasma and the kinetics of generation and loss of active particles in chlorine-nitrogen mixtures

An investigation is performed of the effect of the initial composition of Cl 2 /N 2 mixture on the electrophysical and kinetic parameters of plasma of a dc glow discharge. It is found that the dilution of chlorine with nitrogen causes a variation of the electron energy distribution function (EEDF),...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	High temperature 2008-08, Vol.46 (4), p.466-473
Hauptverfasser:	Efremov, A. M., Sitanov, D. V., Svettsov, V. I.
Format:	Artikel
Sprache:	eng
Schlagworte:	Atoms and Molecules in Strong Fields Classical and Continuum Physics Industrial Chemistry/Chemical Engineering Laser Matter Interaction Materials Science Physical Chemistry Physics Physics and Astronomy Plasma Investigations
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!