Super-tetragonal Sr 4 Al 2 O 7 as a sacrificial layer for high-integrity freestanding oxide membranes

Identifying a suitable water-soluble sacrificial layer is crucial to fabricating large-scale freestanding oxide membranes, which offer attractive functionalities and integrations with advanced semiconductor technologies. Here, we introduce a water-soluble sacrificial layer, "super-tetragonal&qu...

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Veröffentlicht in:	Science (American Association for the Advancement of Science) 2024-01, Vol.383 (6681), p.388-394
Hauptverfasser:	Zhang, Jinfeng, Lin, Ting, Wang, Ao, Wang, Xiaochao, He, Qingyu, Ye, Huan, Lu, Jingdi, Wang, Qing, Liang, Zhengguo, Jin, Feng, Chen, Shengru, Fan, Minghui, Guo, Er-Jia, Zhang, Qinghua, Gu, Lin, Luo, Zhenlin, Si, Liang, Wu, Wenbin, Wang, Lingfei
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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