A micromachined low frequency microphone based on a field effect transistor and an electret

Recently, several Internet of Things (IoT) devices using low-frequency acoustic sound have emerged as promising sensor applications. Unfortunately, the detection of low-frequency sound using miniaturized microphones is restricted due to the low cut-off frequency of capacitive type transduction. To o...

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Veröffentlicht in:	The Journal of the Acoustical Society of America 2016-10, Vol.140 (4), p.3033-3033
Hauptverfasser:	Shin, Kumjae, Kim, Junsoo, Lee, Hoonteak, Seo, Donghwan, Moon, Wonkyu
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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