An ultrasonic actuator working under cryogenic and vacuum circumstance

In this work, we present an ultrasonic actuator that can work under cryogenic vacuum environment. It can be used for adjusting distance between capacitor electrodes in high temperature superconductor filter (HTSF) to tune its pass-band. The actuator is an single crystal chips driven nut-type ultraso...

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Veröffentlicht in:	The Journal of the Acoustical Society of America 2013-11, Vol.134 (5_Supplement), p.4092-4092
Hauptverfasser:	Chen, Zhuzi, Chen, Yu, Zhou, Tieying, Fu, Deyong
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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