High Overtone Bulk Acoustic Resonators Based on Thinned Single-crystal Piezoelectric Layers: Filters and Frequency Sources Applications

The thin film bulk acoustic wave resonators exploiting the thickness-extensional vibration mode of piezoelectric thin films is a key technology as alternative solutions to standard SAW resonators. Lakin have emphasized the capability of High Overtone Bulk Acoustic Resonators to present high quality...

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Veröffentlicht in:	The Journal of the Acoustical Society of America 2008-05, Vol.123 (5_Supplement), p.3647-3647
Hauptverfasser:	Gachon, Dorian, Masson, Jeremy, Courjon, Emilie, Ballandras, Sylvain
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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