In-cycle evolution of thickness and roughness parameters during oxygen plasma enhanced ZnO atomic layer deposition using in situ spectroscopic ellipsometry

We investigate the time evolution of ZnO thin film growth in oxygen plasma-enhanced atomic layer deposition using in situ spectroscopic ellipsometry. The recently proposed dynamic-dual-box-model approach [Kilic et al., Sci. Rep. 10, 10392 (2020)] is used to analyze the spectroscopic data post-growth...

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Veröffentlicht in:	Journal of vacuum science & technology. A, Vacuum, surfaces, and films Vacuum, surfaces, and films, 2024-09, Vol.42 (5)
Hauptverfasser:	Traouli, Yousra, Kilic, Ufuk, G. Kilic, Sema, Hilfiker, Matthew, Schmidt, Daniel, Schoeche, Stefan, Schubert, Eva, Schubert, Mathias
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed Matter Physics Den kondenserade materiens fysik Fysik Natural Sciences Naturvetenskap Physical Sciences
Online-Zugang:	Volltext
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