Piezoelectric and elastic properties of Al0.60Sc0.40N thin films deposited on patterned metal electrodes

Sc-doped aluminum nitride (AlScN) allows for piezoelectric devices with large electromechanical coupling and the benefits increase with larger Sc doping in the film. However, with a larger Sc concentration, the process window narrows, and it is necessary to fine-tune the deposition parameters to ach...

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Veröffentlicht in:	Journal of vacuum science & technology. A, Vacuum, surfaces, and films Vacuum, surfaces, and films, 2024-07, Vol.42 (4)
Hauptverfasser:	Liffredo, Marco, Xu, Nan, Stettler, Silvan, Peretti, Federico, Villanueva, Luis Guillermo
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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