Room-temperature sputter deposition of gold-colored TiN assisted by niobium bombardment from a bipolar HiPIMS source

The deposition of gold-colored titanium nitride films without applying substrate heating is of significant interest due to the increasing demand for decorative coatings on temperature-sensitive three-dimensional substrates. Here, the energetic impact of Nb1+ ions during the deposition of TiN was ach...

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Veröffentlicht in:	Journal of vacuum science & technology. A, Vacuum, surfaces, and films Vacuum, surfaces, and films, 2024-03, Vol.42 (2)
Hauptverfasser:	Fernandez-Martinez, Ivan, Ganesan, Rajesh, Akhavan, Behnam, Matthews, David T. A., Stueber, Michael, Bilek, Marcela M. M., McKenzie, David. R.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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