Performance evaluation of atomic layer deposited TiO2/TiN nanolaminates used as infrared photodetectors

We study the interaction with photodetectors of near infrared (NIR) laser light with power P in the range of mW and period τ = 3.55 fs (wavelength λ = 1064 nm, frequency ν = 0.28 PHz). We fabricate the photodetectors by depositing different sequences of thin TiO2/TiN nano-laminates onto glass substr...

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Veröffentlicht in:	Journal of vacuum science and technology. B, Nanotechnology & microelectronics Nanotechnology & microelectronics, 2024-03, Vol.42 (2)
Hauptverfasser:	Scarel, G., Kokhan, O., Wheeler, V. D.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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