Electrochemical bulk and film-type oxygen sensors: Strategies for detecting extremely low concentration in hydrogen environments
Potentiometric oxygen sensors with excellent sensitivity in a low oxygen concentration range are designed based on intrinsic logarithmic response characteristics, and an asymmetric electrode structure, differentiated from conventional oxygen sensors with reference oxygen gases or parts exposed to ai...
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Veröffentlicht in: | Journal of vacuum science and technology. B, Nanotechnology & microelectronics Nanotechnology & microelectronics, 2023-09, Vol.41 (5) |
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Hauptverfasser: | , , , , |
Format: | Artikel |
Sprache: | eng |
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