VO2 films on flexible thin polyimide films: Fabrication and characterization of electrical and optical properties in insulator-metal transition

We report on the realization of thin polyimide films on which phase transition vanadium dioxide (VO2) films grow. Biased reactive sputtering achieved b-axis-oriented growth of VO2 films on ZnO-buffered polyimide films with a thickness of 8.5 μm. By peeling off the polyimide films from a quartz subst...

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Veröffentlicht in:	Journal of vacuum science & technology. A, Vacuum, surfaces, and films Vacuum, surfaces, and films, 2022-07, Vol.40 (4)
Hauptverfasser:	Miyatake, Yuta, Ozawa, Yukito, Okimura, Kunio, Nakanishi, Toshihiro
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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