VO2 films on flexible thin polyimide films: Fabrication and characterization of electrical and optical properties in insulator-metal transition

VO2 films on flexible thin polyimide films: Fabrication and characterization of electrical and optical properties in insulator-metal transition

We report on the realization of thin polyimide films on which phase transition vanadium dioxide (VO2) films grow. Biased reactive sputtering achieved b-axis-oriented growth of VO2 films on ZnO-buffered polyimide films with a thickness of 8.5 μm. By peeling off the polyimide films from a quartz subst...

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Veröffentlicht in:Journal of vacuum science & technology. A, Vacuum, surfaces, and films Vacuum, surfaces, and films, 2022-07, Vol.40 (4)
Hauptverfasser: Miyatake, Yuta, Ozawa, Yukito, Okimura, Kunio, Nakanishi, Toshihiro
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container_title Journal of vacuum science & technology. A, Vacuum, surfaces, and films
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creator Miyatake, Yuta
Ozawa, Yukito
Okimura, Kunio
Nakanishi, Toshihiro
description We report on the realization of thin polyimide films on which phase transition vanadium dioxide (VO2) films grow. Biased reactive sputtering achieved b-axis-oriented growth of VO2 films on ZnO-buffered polyimide films with a thickness of 8.5 μm. By peeling off the polyimide films from a quartz substrate, stand-alone VO2/ZnO/polyimide layered films that exhibited insulator-metal transition (IMT) with nearly three orders of resistivity change were fabricated. Dependence of IMT on a mechanical curvature was investigated for demonstrating the high flexibility. Temperature-dependent optical transmittance at 1.45 μm showed a high switching ratio for infrared light in VO2/ZnO/polyimide layered films. The proposed structure can be utilized for active metasurfaces that control terahertz waves with quite low reflection loss due to its small thickness.
doi_str_mv 10.1116/6.0001808
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fullrecord <record><control><sourceid>scitation_cross</sourceid><recordid>TN_cdi_crossref_primary_10_1116_6_0001808</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>scitation_primary_10_1116_6_0001808</sourcerecordid><originalsourceid>FETCH-LOGICAL-c295t-83448a2a9c7884f931c3e5f9caa784c2e4c1279ed2e90166eebe66415775cf253</originalsourceid><addsrcrecordid>eNqd0MFKAzEQBuAgCtbqwTfIVWFrkt1ks96kWBUKvajXJc1OaCS7WZIo1pfwlbvtFrx7mmHm44cZhK4pmVFKxZ2YEUKoJPIETShnJJOcV6doQsq8yBgl9BxdxPgxIMaImKDf9xXDxro2Yt9h4-Dbrh3gtLEd7r3b2tY2MIJ7vFDrYLVKdqCqa7DeqKB0gmB_xqE3GBzotFfuQHyfDn0ffA8hWYh4SLZd_HQq-ZC1kIZtCqqLdh9xic6MchGujnWK3haPr_PnbLl6epk_LDPNKp4ymReFVExVupSyMFVOdQ7cVFqpUhaaQaEpKytoGFSECgGwBiEKysuSa8N4PkU3Y64OPsYApu6DbVXY1pTU-0_Woj5-crC3o43apsOh_8NfPvzBum9MvgMeXYT8</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype></control><display><type>article</type><title>VO2 films on flexible thin polyimide films: Fabrication and characterization of electrical and optical properties in insulator-metal transition</title><source>AIP Journals Complete</source><source>Alma/SFX Local Collection</source><creator>Miyatake, Yuta ; Ozawa, Yukito ; Okimura, Kunio ; Nakanishi, Toshihiro</creator><creatorcontrib>Miyatake, Yuta ; Ozawa, Yukito ; Okimura, Kunio ; Nakanishi, Toshihiro</creatorcontrib><description>We report on the realization of thin polyimide films on which phase transition vanadium dioxide (VO2) films grow. Biased reactive sputtering achieved b-axis-oriented growth of VO2 films on ZnO-buffered polyimide films with a thickness of 8.5 μm. By peeling off the polyimide films from a quartz substrate, stand-alone VO2/ZnO/polyimide layered films that exhibited insulator-metal transition (IMT) with nearly three orders of resistivity change were fabricated. Dependence of IMT on a mechanical curvature was investigated for demonstrating the high flexibility. Temperature-dependent optical transmittance at 1.45 μm showed a high switching ratio for infrared light in VO2/ZnO/polyimide layered films. The proposed structure can be utilized for active metasurfaces that control terahertz waves with quite low reflection loss due to its small thickness.</description><identifier>ISSN: 0734-2101</identifier><identifier>EISSN: 1520-8559</identifier><identifier>DOI: 10.1116/6.0001808</identifier><identifier>CODEN: JVTAD6</identifier><language>eng</language><ispartof>Journal of vacuum science &amp; technology. A, Vacuum, surfaces, and films, 2022-07, Vol.40 (4)</ispartof><rights>Author(s)</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c295t-83448a2a9c7884f931c3e5f9caa784c2e4c1279ed2e90166eebe66415775cf253</citedby><cites>FETCH-LOGICAL-c295t-83448a2a9c7884f931c3e5f9caa784c2e4c1279ed2e90166eebe66415775cf253</cites><orcidid>0000-0001-6010-7318 ; 0000-0002-8401-2978</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,777,781,791,4498,27905,27906</link.rule.ids></links><search><creatorcontrib>Miyatake, Yuta</creatorcontrib><creatorcontrib>Ozawa, Yukito</creatorcontrib><creatorcontrib>Okimura, Kunio</creatorcontrib><creatorcontrib>Nakanishi, Toshihiro</creatorcontrib><title>VO2 films on flexible thin polyimide films: Fabrication and characterization of electrical and optical properties in insulator-metal transition</title><title>Journal of vacuum science &amp; technology. A, Vacuum, surfaces, and films</title><description>We report on the realization of thin polyimide films on which phase transition vanadium dioxide (VO2) films grow. Biased reactive sputtering achieved b-axis-oriented growth of VO2 films on ZnO-buffered polyimide films with a thickness of 8.5 μm. By peeling off the polyimide films from a quartz substrate, stand-alone VO2/ZnO/polyimide layered films that exhibited insulator-metal transition (IMT) with nearly three orders of resistivity change were fabricated. Dependence of IMT on a mechanical curvature was investigated for demonstrating the high flexibility. Temperature-dependent optical transmittance at 1.45 μm showed a high switching ratio for infrared light in VO2/ZnO/polyimide layered films. The proposed structure can be utilized for active metasurfaces that control terahertz waves with quite low reflection loss due to its small thickness.</description><issn>0734-2101</issn><issn>1520-8559</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2022</creationdate><recordtype>article</recordtype><recordid>eNqd0MFKAzEQBuAgCtbqwTfIVWFrkt1ks96kWBUKvajXJc1OaCS7WZIo1pfwlbvtFrx7mmHm44cZhK4pmVFKxZ2YEUKoJPIETShnJJOcV6doQsq8yBgl9BxdxPgxIMaImKDf9xXDxro2Yt9h4-Dbrh3gtLEd7r3b2tY2MIJ7vFDrYLVKdqCqa7DeqKB0gmB_xqE3GBzotFfuQHyfDn0ffA8hWYh4SLZd_HQq-ZC1kIZtCqqLdh9xic6MchGujnWK3haPr_PnbLl6epk_LDPNKp4ymReFVExVupSyMFVOdQ7cVFqpUhaaQaEpKytoGFSECgGwBiEKysuSa8N4PkU3Y64OPsYApu6DbVXY1pTU-0_Woj5-crC3o43apsOh_8NfPvzBum9MvgMeXYT8</recordid><startdate>20220701</startdate><enddate>20220701</enddate><creator>Miyatake, Yuta</creator><creator>Ozawa, Yukito</creator><creator>Okimura, Kunio</creator><creator>Nakanishi, Toshihiro</creator><scope>AAYXX</scope><scope>CITATION</scope><orcidid>https://orcid.org/0000-0001-6010-7318</orcidid><orcidid>https://orcid.org/0000-0002-8401-2978</orcidid></search><sort><creationdate>20220701</creationdate><title>VO2 films on flexible thin polyimide films: Fabrication and characterization of electrical and optical properties in insulator-metal transition</title><author>Miyatake, Yuta ; Ozawa, Yukito ; Okimura, Kunio ; Nakanishi, Toshihiro</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c295t-83448a2a9c7884f931c3e5f9caa784c2e4c1279ed2e90166eebe66415775cf253</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2022</creationdate><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Miyatake, Yuta</creatorcontrib><creatorcontrib>Ozawa, Yukito</creatorcontrib><creatorcontrib>Okimura, Kunio</creatorcontrib><creatorcontrib>Nakanishi, Toshihiro</creatorcontrib><collection>CrossRef</collection><jtitle>Journal of vacuum science &amp; technology. A, Vacuum, surfaces, and films</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Miyatake, Yuta</au><au>Ozawa, Yukito</au><au>Okimura, Kunio</au><au>Nakanishi, Toshihiro</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>VO2 films on flexible thin polyimide films: Fabrication and characterization of electrical and optical properties in insulator-metal transition</atitle><jtitle>Journal of vacuum science &amp; technology. A, Vacuum, surfaces, and films</jtitle><date>2022-07-01</date><risdate>2022</risdate><volume>40</volume><issue>4</issue><issn>0734-2101</issn><eissn>1520-8559</eissn><coden>JVTAD6</coden><abstract>We report on the realization of thin polyimide films on which phase transition vanadium dioxide (VO2) films grow. Biased reactive sputtering achieved b-axis-oriented growth of VO2 films on ZnO-buffered polyimide films with a thickness of 8.5 μm. By peeling off the polyimide films from a quartz substrate, stand-alone VO2/ZnO/polyimide layered films that exhibited insulator-metal transition (IMT) with nearly three orders of resistivity change were fabricated. Dependence of IMT on a mechanical curvature was investigated for demonstrating the high flexibility. Temperature-dependent optical transmittance at 1.45 μm showed a high switching ratio for infrared light in VO2/ZnO/polyimide layered films. The proposed structure can be utilized for active metasurfaces that control terahertz waves with quite low reflection loss due to its small thickness.</abstract><doi>10.1116/6.0001808</doi><tpages>6</tpages><orcidid>https://orcid.org/0000-0001-6010-7318</orcidid><orcidid>https://orcid.org/0000-0002-8401-2978</orcidid></addata></record>
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title VO2 films on flexible thin polyimide films: Fabrication and characterization of electrical and optical properties in insulator-metal transition
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-19T23%3A16%3A06IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-scitation_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=VO2%20films%20on%20flexible%20thin%20polyimide%20films:%20Fabrication%20and%20characterization%20of%20electrical%20and%20optical%20properties%20in%20insulator-metal%20transition&rft.jtitle=Journal%20of%20vacuum%20science%20&%20technology.%20A,%20Vacuum,%20surfaces,%20and%20films&rft.au=Miyatake,%20Yuta&rft.date=2022-07-01&rft.volume=40&rft.issue=4&rft.issn=0734-2101&rft.eissn=1520-8559&rft.coden=JVTAD6&rft_id=info:doi/10.1116/6.0001808&rft_dat=%3Cscitation_cross%3Escitation_primary_10_1116_6_0001808%3C/scitation_cross%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true