Vertical cavity surface emitting lasers incorporating structured mirrors patterned by electron-beam lithography

We demonstrate the operation of bottom-emitting vertical cavity surface-emitting lasers (VCSELs) with linear mode polarization which is controlled in an arbitrary orientation by the use of patterned metallic mirrors on top of the VCSEL surface. The top mirror is made in the shape of a 200 nm pitch g...

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Veröffentlicht in:	Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 1999-11, Vol.17 (6), p.3222-3225
Hauptverfasser:	Berseth, C.-A., Dwir, B., Utke, I., Pier, H., Rudra, A., Iakovlev, V. P., Kapon, E., Moser, M.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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