Comprehensive analysis of field-electron emission properties of nanosized silicon blade-type and needle-type field emitters

The reproducibility of complementary metal-oxide-semiconductor (CMOS) technology makes it very promising for creating commercially available vacuum emission micro/nanoelectronic devices. However, there are a number of challenges that occur with CMOS, including current hysteresis, transition to the g...

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Veröffentlicht in:	Journal of vacuum science and technology. B, Nanotechnology & microelectronics Nanotechnology & microelectronics, 2019-03, Vol.37 (2)
Hauptverfasser:	Demin, Gleb D., Djuzhev, Nikolay A., Filippov, Nikolay A., Glagolev, Petr Yu, Evsikov, Iliya D., Patyukov, Nikolay N.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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