Atomic layer deposition of Ti-Nb-O thin films onto electrospun fibers for fibrous and tubular catalyst support structures

Here, the authors report on the preparation of core–shell carbon-ceramic fibrous as well as ceramic tubular catalyst supports utilizing electrospinning and atomic layer deposition (ALD). In this paper, ALD of Ti-Nb-O thin films using TiCl4, Nb(OEt)5, and H2O as precursors is demonstrated. According...

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Veröffentlicht in:	Journal of vacuum science & technology. A, Vacuum, surfaces, and films Vacuum, surfaces, and films, 2018-01, Vol.36 (1)
Hauptverfasser:	Putkonen, Matti, Heikkilä, Pirjo, Pasanen, Antti T., Rautkoski, Hille, Svärd, Laura, Simell, Pekka, Vähä-Nissi, Mika, Sajavaara, Timo
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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