Deposition and etching characteristic of magnetite thin film for absorptive wire grid polarizer with 45 nm line and space pattern

Magnetite, Fe3O4, is a mineral and one of three commonly naturally occurring oxides of iron. Small grains of magnetite exist in almost all igneous and metamorphic rocks. Most advance studies on magnetite films have focused on the characteristics of films by the growth of crystals such as nanowires....

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Veröffentlicht in:	Journal of vacuum science and technology. B, Nanotechnology & microelectronics Nanotechnology & microelectronics, 2016-11, Vol.34 (6)
Hauptverfasser:	Cho, Young Tae, Jeong, Jiyun, Kim, Ji Hoon, Kim, Yun Jae, Jeong, Yeon Ho, Jung, Yoon Gyo, Kwon, Sin
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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