Band offsets in Sc2O3/ZnO heterostructures deposited by RF magnetron sputtering

ZnO is promising for a number of applications in light emission, sensors, and transparent conducting electronics, but its surface is susceptible to instabilities caused by atmospheric exposure. Thus, there is a need for stable passivation or gate dielectric layers that might obviate this issue. One...

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Veröffentlicht in:	Journal of vacuum science and technology. B, Nanotechnology & microelectronics Nanotechnology & microelectronics, 2015-09, Vol.33 (5)
Hauptverfasser:	Hays, David C., Gila, Brent P., Pearton, Stephen J., Kim, Byung-Jae, Ren, Fan, Jang, Tae Sung
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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